Compression principle of scroll vacuum pump
The rotary scroll rotates in the order of 1-2-3-4 as shown in the figure → the crescent-shaped compression chamber gradually decreases in volume → the compressed air is discharged from the exhaust port at the central part
The advanced compression principle ensures the continuity and stability of the suction, compression, and exhaust cycles
host structure
The main unit is compact in structure and boasts high machining accuracy. Compared to the main unit module of a screw vacuum pump, it has fewer components and consumes fewer parts (no intake/exhaust valves, valve plates, or other parts)
There is no direct metal contact between the compressed scrolls, resulting in smooth operation and low noise
After precision machining, special coating treatment is applied to ensure high stability even in harsh environments
The VE series oil-free scroll vacuum pumps, also known as scroll pumps, scroll vacuum pumps, dry scroll pumps, oil-free scroll pumps, oil-free scroll vacuum pumps, and dry scroll vacuum pumps, are an important type of oil-free vacuum pump products. They are widely used in various fields such as the semiconductor industry, optoelectronics, materials, medical care, energy, aerospace, analytical instruments, scientific research, and vacuum systems. They are trusted by users across various industries for their advantages, including reliability and durability, low vibration, low noise, low energy consumption, compact size, light weight, global power supply compatibility, one-button start, and the ability to frequently start and stop between atmospheric pressure and vacuum.
The VE series oil-free scroll vacuum pump consists of a pump head, a motor, a bracket assembly, etc. The pump head includes a movable scroll, a fixed scroll, a crankshaft, seals, a fan, and a pump housing. The scroll consists of a circular plane and one or several involute spiral walls extending from it. The fixed scroll and the movable scroll form a scroll pair, which constitutes the basic compression mechanism of the oil-free scroll compressor. During operation, the movable and fixed scrolls do not touch each other and rely on relative motion to form a crescent-shaped enclosed compression chamber with continuously shrinking volume. Through the suction, compression, and exhaust cycles, the working gas is inhaled from the suction port, compressed, and then collected from the exhaust port, achieving continuous suction and compression of the working gas.
characteristic
oil-free
No oil return or spraying, providing a clean vacuum and surrounding working environment
Large pumping speed range
4~60 cubic meters per hour
Low limit pressure
1~8 bar, capable of continuous operation, stable and reliable
Low noise, low vibration
54~67 decibels, providing a comfortable and healthy working environment
Suitable for global power supply
110/220/380/460V, 50/60Hz optional
High efficiency and low operating costs
No daily maintenance is required, no water cooling is needed, and no oil lubrication is required
Easy to operate
One-button start, capable of frequent starting and shutting down between atmospheric pressure and vacuum
purpose
semiconductor industry
Magnetron sputtering, laser sputtering, evaporation coating
Chip plasma polishing, chip packaging, chip transmission
Glove box, exhaust station, sample transfer, and vacuum pumping in the pre-treatment chamber
He mass spectrometry leak detection
photoelectric industry
LED packaging, liquid crystal injection and packaging
Material industry
Material preparation -- 3D printing, single crystal growth furnace
Vacuum welding - electron beam welding, laser welding
Vacuum cleaning - plasma cleaning, microwave cleaning, microwave drying
Food and drugs
Vacuum packaging, vacuum storage
Food and drug freeze drying, vacuum drying
medical hygiene
Plasma sterilization, vacuum storage of medical devices, dental equipment
Energy industry
Lithium battery preparation and packaging
Preparation and packaging of hydrogen fuel cells
aerospace
Space environment simulation, material processing and treatment
Analytical Instrument
Accelerator, mass spectrometer, energy dispersive spectrometer, scanning electron microscope
vacuum equipment
Molecular pump unit, Roots pump unit
Condensate pump regeneration, etc
| 类别 (Category) | 参数项 (Parameter) | 单位 (Unit) | VESP75 | VESP150 | VESP300 | VESP600 | VESP800 | VESP1000 |
| 抽气速度 (Pumping Speed) | l/s | 1.1 | 2 | 4.3 | 8.7 | 12 | 16.6 | |
| l/min | 66 | 120 | 258 | 522 | 720 | 996 | ||
| m³/h | 4 | 7.2 | 15.5 | 31.3 | 43.2 | 59.8 | ||
| cfm | 2.3 | 4.2 | 9.1 | 18.4 | 25.4 | 35.2 | ||
| 极限真空度 (Ultimate Vacuum) | Pa | ≤8 | ≤5 | ≤2.6 | ≤1 | ≤1 | ≤1 | |
| mbar | ≤8.0×10⁻² | ≤5.0×10⁻² | ≤2.6×10⁻² | ≤1.0×10⁻² | ≤1.0×10⁻² | ≤1.0×10⁻² | ||
| Torr | ≤6.0×10⁻² | ≤3.8×10⁻² | ≤2.0×10⁻² | ≤7.5×10⁻³ | ≤7.5×10⁻³ | ≤7.5×10⁻³ | ||
| psi | ≤1.2×10⁻³ | ≤7.2×10⁻⁴ | ≤3.8×10⁻⁴ | ≤1.5×10⁻⁴ | ≤1.5×10⁻⁴ | ≤1.5×10⁻⁴ | ||
| 噪音 (Noise) | dB(A) | ≤54 | ≤57 | ≤63 | ≤63 | ≤65 | ≤67 | |
| 漏率 (Leak Rate) | mbar·l/s | 1×10⁻⁶ | ||||||
| 最大进 / 排气压力 (Max. Inlet/Exhaust Pressure) | 大气压 (atm) | 1 / 1.3 | ||||||
| 工作环境温度 (Ambient Temperature) | ℃ | 0~40 | ||||||
| 单相电机 (Single-Phase Motor) | 功率 (Power) | kW | 0.2 | 0.55 | 0.75 | 1.1 | 1.5 | |
| 电压 (Voltage) | V | 220 (50/60Hz) | 100/115/200/230 (50/60Hz) 100-240 (50/60Hz) | 230 (50/60Hz) 110 (60Hz) | 230 (50/60Hz) | 230 (50/60Hz) | ||
| 转速 (Rotation Speed) | rpm | 1425 (50Hz), 1725 (60Hz) | ||||||
| 连接插头 (Plug Type) | 国标、北美、欧洲、英国、爱尔兰、印度等 (CN, NA, EU, UK, IE, IN, etc.) | |||||||
| 三相电机 (Three-Phase Motor) | 功率 (Power) | kW | 0.55 | 0.75 | 1.1 | 1.5 | ||
| 电压 (Voltage) | V | -- | 200-240 (50/60Hz)， 380-415 (50Hz)， 380-460 (60Hz) | |||||
| 转速 (Rotation Speed) | rpm | -- | 1425 (50Hz), 1725 (60Hz) | |||||
| 进 / 排气口法兰 (Inlet/Exhaust Flange) | KF25/KF25 | KF25/KF25 | KF25/KF25 | KF25/KF25 | KF40/KF25 | KF40/KF25 | ||
| 外形尺寸 (Dimensions) | 单相 (Single-Phase) | mm | 332*225*257 | 461*263*284 | 498*307*335 | 527*326*355 | 546*369*397 | -- |
| 三相 (Three-Phase) | mm | -- | 448*263*284 | 486*307*335 | 512*326*355 | 565*369*397 | 577*454*407 | |
| 净重 (Net Weight) | 单相 (Single-Phase) | kg | 15 | 21 | 28 | 36 | 40 | -- |
| 三相 (Three-Phase) | kg | -- | 21 | 28 | 36 | 40 | 54 | |
| 冷却形式 (Cooling Method) | *风冷 (Air-cooled) | |||||||
| 其他 (Notes) | 带气镇 (Gas ballast included) | |||||||
